composite oxide film

composite oxide film
композитная оксидная плёнка (состоит из нескольких слоёв разного химического состава и/или структуры, напр., двухслойная плёнка, состоящая из слоёв аморфного и кристаллического оксида; обычно получают при специальных режимах оксидирования)

Англо-русский словарь промышленной и научной лексики. 2014.

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